Aggregation States-Oxygen Permeability Relationships of Plasma-Polymerized Thin Films from Perfluorobenzene
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چکیده
منابع مشابه
Plasma Polymerized Thin Films Materials: Synthesis, Characterization, and Application Tests
Organic–inorganic hybrid co-polymer thin films were deposited on silicon(100) substrates under the several ratio of TEOS (tetraethoxysilane) against cyclohexene by plasma enhanced chemical vapour deposition (PECVD) method. Toluene and TEOS were utilized as organic and inorganic precursors each, and hydrogen and argon were also used as a bubbler and carrier gases, respectively. In order to compa...
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ژورنال
عنوان ژورنال: Polymer Journal
سال: 1986
ISSN: 0032-3896,1349-0540
DOI: 10.1295/polymj.18.529